Description

Functions

1. Calibrate motion accuracy of guide rail quickly and accurately.

2. Measure and analyze many kinds of dynamic parameters, such as displacement, velocity, acceleration and amplitude frequency.

3. Built-in variety of general standards of machine tools.

4. Standard: Environmental compensation device; Linear prism (0-80m); Software.

  Optional: Angle/Flatness/Straightness/Squareness prisms; Precision turntable and Ballbar.

System parameters:

1. Measuring method: single frequency

2. Laser frequency accuracy: 0.05ppm

3. Dynamic capture rate: 50kHz

4. Warm-up time: about 6 min

5. Operating temperature: (0~40)℃

6. Environment temperature: (0~40)℃, humidity: 0~95%

7. Storage temperature: -20℃~70℃

Environmental sensors:

1. Atmospheric temperature sensor : ±0.1℃(0~40)℃, resolution: 0.01℃

2. Material temperature sensor: ±0.1℃(0~40)℃, resolution: 0.01℃

3. Atmospheric humidity sensor: ±5% (0~95%)

4. Atmospheric pressure sensor: ±0.1kPa (65~115)kPa

Linearity measurement:

1. Measuring range: (0~80)m

2. Measuring accuracy: 0.5ppm (0~40)℃

3. Measuring resolution: 1nm

4. Maximum measuring speed: 4m/s

示意图.jpg

应用.jpg




LIMS-100

Laser Interferometer Measurement System


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